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Pumps |
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Small Dry Pumps |
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Smart Dry Pumps |
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6to18 cfm,10to28 m3/hr,170to500 l/min |
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16 cfm |
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No Cooling Water! |
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20 mTorr Ultimate Pressure |
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No Purge Gas! |
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No Cooling Water! |
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No Oil Whatsoever! |
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No Purge Gas! |
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No Waste Disposal |
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No Oil Whatsoever! |
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Models with No
Mantenance for |
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No Waste Disposal! |
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10,000 and 20,000 hours |
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No Maintenance for 20,000 hours |
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100-3.5 Two Stage Rotary Vane
Vacuum Pump |
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800-28 Two Stage Rotary
Vane Vacuum Pump |
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100 l/min • 3.5 CFM • 6 m3/hr. |
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800 l/min • 28 CFM • 48 m3/hr. |
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Backing Turbo Pumps |
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Backing Turbo Pumps |
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Vacuum Ovens and Furnaces |
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Vacuum Ovens and Furnaces |
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Electron Microscopes |
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Electron Microscopes |
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Freeze Dryers |
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Freeze Dryers |
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Cluster Tool Load Locks |
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Cluster Tool Load Locks |
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Sputter and Deposition Systems |
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Sputter and Deposition Systems |
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