Small Dry Pumps Smart Dry Pumps
Small Dry Pumps
6to18 cfm,10to28 m3/hr,170to500 l/min  Smart Dry Pumps
16 cfm 
No Cooling Water!  20 mTorr Ultimate Pressure 
No Purge Gas!  No Cooling Water! 
No Oil Whatsoever!  No Purge Gas! 
No Waste Disposal  No Oil Whatsoever! 
Models with No Mantenance for No Waste Disposal! 
10,000 and 20,000 hours  No Maintenance for 20,000 hours 
100-3.5 Two Stage Rotary Vane Vacuum Pump 800-28 Two Stage Rotary Vane Vacuum Pump
100 l/min 3.5 CFM 6 m3/hr.
800 l/min 28 CFM 48 m3/hr.
Backing Turbo Pumps Backing Turbo Pumps
Vacuum Ovens and Furnaces Vacuum Ovens and Furnaces
Electron Microscopes Electron Microscopes
Freeze Dryers Freeze Dryers
Cluster Tool Load Locks Cluster Tool Load Locks
Sputter and Deposition Systems Sputter and Deposition Systems